Prof. Pawel Janus Profile

Prof. Pawel Janus

at Instytut Technologii Elektronowej

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Author

Publications (11)

Proceedings Article | 10 November 2016 Paper

Soft dielectric cantilevers with silicon tips for atomic force microscopy applications

Paweł Janus, Rafał Dobrowolski, Andrzej Sierakowski, Francesco Ivaldi, Dariusz Szmigiel, Jerzy Zając

Proceedings Volume 10161, 1016104 (2016) https://doi.org/10.1117/12.2244789

KEYWORDS: Atomic force microscopy, Dielectrics, Silicon, Manufacturing, Silica, Finite element methods, Etching, Sensors, Optics manufacturing, Deep reactive ion etching

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Proceedings Article | 10 November 2016 Paper

Gravimetric measurements with use of a cantilever for controlling of electrochemical deposition processes

Piotr Prokaryn, Pawel Janus, Jerzy Zajac, Andrzej Sierakowski, Krzysztof Domanski, Piotr Grabiec

Proceedings Volume 10161, 1016107 (2016) https://doi.org/10.1117/12.2245041

KEYWORDS: Deposition processes, Gold, Silicon, Sensors, Calibration, Electrodes, Profilometers, Platinum, Velocity measurements, Metals

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Proceedings Article | 10 November 2016 Paper

Innovative multi-cantilever array sensor system with MOEMS read-out

F. Ivaldi, T. Bieniek, P. Janus, P. Grabiec, W. Majstrzyk, D. Kopiec, T. Gotszalk

Proceedings Volume 10161, 1016102 (2016) https://doi.org/10.1117/12.2244154

KEYWORDS: Sensors, Microopto electromechanical systems, Micromirrors, Calibration, Electronics, Head, Laser sources, System integration, Signal to noise ratio, Data acquisition

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Proceedings Article | 16 September 2014 Paper

Shear force microscopy using piezoresistive cantilevers in surface metrology

Teodor Gotszalk, Daniel Kopiec, Andrzej Sierakowski, Paweł Janus, Piotr Grabiec, Ivo Rangelow

Proceedings Volume 9236, 92360A (2014) https://doi.org/10.1117/12.2066247

KEYWORDS: Metrology, Atomic force microscopy, Actuators, Microscopy, Calibration, Sensors, Wheatstone bridges, Standards development, Optical fibers, Silicon

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Proceedings Article | 16 September 2014 Paper

Design, technology, and application of integrated piezoresistive scanning thermal microscopy (SThM) microcantilever

Paweł Janus, Piotr Grabiec, Andrzej Sierakowski, Teodor Gotszalk, Maciej Rudek, Daniel Kopiec, Wojciech Majstrzyk, Guillaume Boetsch, Bernd Koehler

Proceedings Volume 9236, 92360R (2014) https://doi.org/10.1117/12.2066240

KEYWORDS: Silicon, Sensors, Wheatstone bridges, Optical lithography, Microscopy, Electronics, Platinum, Semiconducting wafers, Bridges, Amplifiers

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Proceedings Article | 25 July 2013 Paper

Microcontact printing technology as a method of fabrication of patterned self-assembled monolayers for application in nanometrology

Piotr Pałetko, Magdalena Moczała, Paweł Janus, Piotr Grabiec, Teodor Gotszalk

Proceedings Volume 8902, 89021Z (2013) https://doi.org/10.1117/12.2031273

KEYWORDS: Self-assembled monolayers, Molecules, Atomic force microscopy, Silicon, Gold, Molecular electronics, Silica, Printing, Manufacturing, Molecular self-assembly

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Proceedings Article | 25 July 2013 Paper

Silicon nanowires reliability and robustness investigation using AFM-based techniques

Tomasz Bieniek, Grzegorz Janczyk, Paweł Janus, Piotr Grabiec, Marek Nieprzecki, Grzegorz Wielgoszewski, Magdalena Moczała, Teodor Gotszalk, Elizabeth Buitrago, Montserrat Badia, Adrian Ionescu

Proceedings Volume 8902, 89022L (2013) https://doi.org/10.1117/12.2031229

KEYWORDS: Atomic force microscopy, Silicon, Reliability, Scanning electron microscopy, Biosensing, Nanostructures, Nanolithography, Field effect transistors, Sensing systems, Nanowires

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Proceedings Article | 25 July 2013 Paper

Manufacturing, measurement and control of MEMS / NEMS electrostatically driven structures

Magdalena Ekwińska, Piotr Kunicki, Tomasz Piasecki, Paweł Janus, Krzysztof Domański, Tomasz Bieniek, Piotr Grabiec, Teodor Gotszalk

Proceedings Volume 8902, 89021X (2013) https://doi.org/10.1117/12.2031093

KEYWORDS: Manufacturing, Microelectromechanical systems, Capacitance, Optical testing, Control systems, Nanoelectromechanical systems, Electrodes, Polarization, Silica, Neodymium

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Proceedings Article | 25 July 2013 Paper

Microfabricated support structures for investigations of mechanical and electrical graphene properties

Krzysztof Gajewski, Teodor Gotszalk, Andrzej Sierakowski, Paweł Janus, Piotr Grabiec

Proceedings Volume 8902, 89020G (2013) https://doi.org/10.1117/12.2030886

KEYWORDS: Graphene, Nanostructures, Photomasks, Photoresist materials, Microfabrication, Silicon, Chemical vapor deposition, Silica, Computer aided design, Lithography

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Proceedings Article | 17 April 2012 Paper

Optimization method of photolithography process by means of atomic force microscopy

Andrzej Sierakowski, Paweł Janus, Daniel Kopiec, Konrad Nieradka, Krzysztof Domanski, Piotr Grabiec, Teodor Gotszalk

Proceedings Volume 8352, 83520B (2012) https://doi.org/10.1117/12.918024

KEYWORDS: Atomic force microscopy, Photoresist materials, Optical lithography, Maskless lithography, System integration, Head, Image processing, Photoresist developing, Scanners, Error analysis

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Proceedings Article | 4 November 2002 Paper

Thermal imaging of microwave power GaAs-FET with scanning thermal nanoprobe

Mojtaba Joodaki, Pawel Janus, Teodor Gotszalk, Guenter Kompa, Klaus Edinger, Ivo Rangelow

Proceedings Volume 4809, (2002) https://doi.org/10.1117/12.450989

KEYWORDS: Thermography, Temperature metrology, Microwave radiation, Transistors, Infrared radiation, Diodes, Near field, Spatial resolution, Liquid crystals, Nanoprobes

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Showing 5 of 11 publications

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